Standaid Mass Flow Meter MODEL3760 SERIES Model 3760 Model 3765
Xuất sứ: Japan
Nhà cung cấp: Pites
Hãng sản xuất: KOFLOC
Mr. Hà
live:ha_1652Standaid Mass Flow Meter MODEL3760 SERIES
The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes
Features
・Improved constant-current temperature difference detection type flow sensor for quick response
・The compact body permits installation at any location.
Standard Specifications
| Model | 3760 | 3765 |
| Flow range (N2 equivalent, 20℃/1atm) | 10 SCCM–20 SLM (freely selectable) |
30 SLM–100 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Response | 2 sec. or less | 3 sec. or less |
| Accuracy | ±1.0%F.S. (25℃) | ±1.5%F.S. (25℃) |
| Temperature coefficient | ±0.1 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
| Repeatability | ±0.5%F.S. (20℃) | |
| Proof pressure | 980kPa (G) | |
| Leak rate | 1 × 10-8 Pa·m3/s or less (excluding permeation of He) | |
| Allowable ambient temperature | 5–45℃ | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases |
Body: SUS316 | |
| Sealing: FKM (option: CR or NBR) | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) | |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply | +15VDC (±5%) 100mA, −15VDC (±5%)100mA | |
| Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc. |
| Weight | Approx. 800 g | Approx. 1000 g |
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Applications
・Air sampling
・Analyzer component
・Bioreactor
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・R&D
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition
