METER MODEL 5100 kolfoc Vietnamq
Hãng sản xuất: KOFLOC
Mr. Hà
live:ha_1652METER MODEL 5100 kolfoc Vietnam, METER MODEL 5100 kolfoc Viet nam. METER MODEL 5100 kolfoc,
KOFLOC Vietnam, KOFLOC Viet nam, KOFLOC
Features
・ High accuracy and high response are achieved by the flow sen-sor with temperature-following current difference detection.
・ A normally-closed solenoid valve is employed.
・ A low leak rate is achieved by the weldless structure and metalseal.
・ The dead volume is reduced thanks to the diaphragm seat valve.
・ The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.
Standard Specifications
| Flow range (N2 equivalent, 20℃/1 atm) |
1 SCCM–20 SLM (The conditions are freely selectable) |
| Sensor | Thermal mass flow sensor |
| Valve type | Proportional solenoid valve (closed when not energized) |
| Control range | 2–100% (F.S.) |
| Response | 1 sec. or less (0–100% within ±2% typical) |
| Accuracy | ±1% F.S. (Accuracy guaranteed at 15–35℃) |
| Repeatability | ±0.2%F.S. |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa |
| F.S. > 5 SLM: 100–300 kPa | |
| Option: Low differential pressure (LP) specification is available depending on conditions. | |
| Allowable operating pressure | 300 kPa (G) or less |
| Proof pressure | 980 kPa (G) |
| Leak rate | 1 × 10-11 Pa·m3/s or less |
| Allowable ambient temperature | 0–50℃ |
| Allowable ambient humidity | 10–90% (No condensation allowed) |
| Materials of parts in contact with gases |
Body: SUS316L |
| Diaphragm:SUS316L | |
| Valve seat: PTFE | |
| Sealing: SUS316L, Ni, Au | |
| Option: SUS seal (SU), inner surface polish (KP) | |
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
| Joint (Main unit bore) | Standard: 1/4 VCR equivalent Option: 1/4 SWL |
| Weight | Approx. 1000 g |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Applications
・Air sampling
・Analyzer component
・Bioreactor
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・R&D
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition
