Brooksinstrument Vietnam, Bộ điều khiển và đồng hồ đo lưu lượng nhiệt kín GF40

Datasheet

GF40
Flow Range (Full Scale Capacity)

3 sccm - 50 slm
Accuracy

1% S.P. 35-100%

0.35% F.S. 2-35%
Max Pressure 150 psig/10 bar
Repeatability <0.20% S.P.
Multi-Gas & Range Configurability MultiFlo™ Available
Diagnostic Capability

Status Lights: MFC Health, Network Status

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port: RS485 via 2.5 mm jack
Analog Communication

 0-5 V,  0-10 V, 0-20 mA, 4-20 mA
Digital Communication

DeviceNet™

EtherCAT™

Profibus®

RS485