MFM MODEL EX-550 kofloc Vietnam
Hãng sản xuất: KOFLOC
Mr. Hà
live:ha_1652MFM MODEL EX-550 kofloc Vietnam, MFM MODEL EX-550 kofloc Viet nam. MFM MODEL EX-550 kofloc
KOFLOC Vietnam, KOFLOC Viet nam, KOFLOC
Features
Metal sealing design
Lower cost but high accuracy measurement.
High speed response and zero stability.
0-5VDC or 4-20mA input/output signal and +/-15VDC or 24VDC power supply.
Mediocrity D-sub 9pin.
Gases registered in EX-550 are usable by rotary-switch.
*Calculate the flow rate with conversion factor based on N2 gas.
RoHS compliance, CE marked.
Stand Specifications
| Model | Mass Flow Controller | Mass Flow Meter | |
| EX-550C | EX-550M | ||
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | - | |
| Applicable gases（*1） | N2、Air、H2、He、Ar、O2、CO2 etc. | ||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |||
| Flow range（*2） | 10SCCM ～ 5SLM | ||
| Control（measure）range | 2 ～ 100%(F.S.) | ||
| Response | ≤ 1sec （within ± 2%F.S.）（*4） | ||
| Accuracy | ± 1.0%S.P. (25%F.S. ～ 100%F.S.) , ± 0.25%F.S. ( ～ 25%F.S.) | ||
| Repeatability | ± 0.2%FS | ||
| Operating differential pressure（*3） | 50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa） | - | |
| Inlet maximum pressure | 350kPa（G） | ||
| Proof pressure | 980kPa（G） | ||
| External leak rate（He） | ≤ 1.0 × 10-11Pa・m3/sec | ||
| Temperature | Working temp. | 5 ～ 50℃ | |
| Accuracy guaranteed temp. | 15 ～ 35℃ | ||
| Allowable storage temp. | -10 ～ 60℃ | ||
| Allowable operating humidity | 10 ～ 90%RH（without dew condensation） | ||
| Materials of gas contact part | SUS316L、PTFE、Ni-Co | ||
| Electrical connection | Dsub 9pin KFC Standard（SEMI standard compliant） | ||
| HR-10A × 2 | |||
| Flow rate setting signal | 0～5VDC(input impedance: approx. 1M Ω) | - | |
| or 4～20mA(input impedance: approx. 250 Ω) | |||
| Flow rate output signal | 0 ～ 5VDC( load resistance ≧10k Ω) | ||
| or 4 ～ 20mA( load resistance ≧500 Ω) | |||
| Digital communication | RS485 rotary-switch address setting | ||
| Required power supply (DC) | +15VDC( ± 5%)100mA , -15VDC（± 5%）150mA | ||
| or +24VDC（± 10%） ≤180mA (MFM would be ≤100mA) | |||
| Joint | 1/4VCR | ||
| Mounting posture | Free | ||
| Weight | Approx.800g | Approx.550g | |
