Meter MODEL 5400 kolfoc Vietnam
Hãng sản xuất: KOFLOC
Mr. Hà
live:ha_1652METER MODEL 5400 kofloc Vietnam, METER MODEL 5400 kofloc Viet nam. METER MODEL 5400 kofloc
KOFLOC Vietnam, KOFLOC Viet nam, KOFLOC
Features
・ Control and response in each setting range are improved.
・ The following capability to the set voltage is improved (support-ing ramping specifications).
・ As the valve is improved, the control resolution in each range is improved.
Standard Specifications
| Model | 5400 | 5410 |
| Flow range (N2 equivalent, 20℃/1 atm) |
10 SCCM–20 SLM (freely selectable) | 10 SCCM–20 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Valve type | Proportional solenoid valve (closed when not energized) | − |
| Control range | 2–100% (F.S.) | − |
| Response | 1 sec. or less (0–100% within ±2% typical) | − |
| Accuracy | ±1% F.S. (20℃) | |
| Repeatability | Within ±0.2% F.S. (20℃) | |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa | − |
| F.S.> 5 SLM: 100–300 kPa | − | |
| Allowable operating pressure | 300 kPa (G) or less | |
| Proof pressure | 980 kPa (G) | |
| Leak rate | 1 × 10-11 Pa·m3/s or less | |
| Allowable ambient temperature | 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃) | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases |
Body: SUS316L | |
| Diaphragm: Ni-Co | ||
| Valve seat: PTFE | ||
| Sealing: SUS316L, Ni | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) | |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) | − |
| Flow rate output signals | 0–5 VDC (Minimum load resistance: 250 kΩ or more) | |
| Required power supply | +15 VDC (±5%) 100 mA, −15VDC (±5%) 200mA |
+15 VDC (±5%) 100 mA, −15VDC (±5%) 100mA |
| Joint (Main unit bore) | Standard: 1/4 VCR equivalent Option: 1/4 SWL | |
| Weight | Approx. 1000 g | Approx. 800 g |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Applications
・Air sampling
・Analyzer component
・Bioreactor
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・R&D
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition
